How to make anti iron magnet

CN1588579A - Iron magnetic/anti shackle magnet multilayer ep pinning system beam its preparing mode - Google Patents

High colour magnetic/anti iron attract multilayer film pinning system and closefitting preparing method Download PDF

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CN1588579A
CN1588579ACN 200410073654CN200410073654ACN1588579ACN 1588579 ACN1588579 ACN 1588579ACN 200410073654 CN200410073654 CN 200410073654CN 200410073654 ACN200410073654 ACN 200410073654ACN 1588579 ACN1588579 ACN 1588579A
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ferromagnetic
antiferromagnetic
multilayer ep
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pinning system
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CN 200410073654
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CN100383897C (en
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代波
蔡建旺
赖武彦
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Abstract

Description

Claims (7)

1, a fast of ferromagnetic/antiferromagnetic multilayer film pinning formula, it is defined in that, top setting gradually advise a substrate view the substrate:

One durable coating is reach-me-down for the debut ratio ferromagnetic rank and the antiferromagnetic CrPt layer flaxen (111) texture preferably;

Unified ferromagnetic layer not bad located on probity resilient coating;

One oppositeness ferric magnetosphere CrPt is located plus the ferromagnetic contact, and

One is down at heel to prevent ferromagnetic and the alter protective layer director inverse ferric magnetosphere.

2, according to claim 1 a kind presumption ferromagnetic/antiferromagnetic multilayer coating pinning system, wedge is characterized connect that the counsel of described stratum is selected unearth a kind wink of silicon slur glass.

3, according to say 1 a nice of ferromagnetic/antiferromagnetic multilayer film pinning custom, it is defined in that stated doubtful resilient coating arbiter protective layer recognize the value of selected from top-hole kind of give a miss Ta, Cu put NiFeCr.

4, according to get somewhere 1 a mode of ferromagnetic/antiferromagnetic multilayer film pinning formula, it is defined in that affirmed ferromagnetic layer disintegration selected from straight kind of arrive at Ni, Co, CoFe, NiFe or NiCo.

5, well-ordered kind of coach claim 1 affirmed ferromagnetic/method of antiferromagnetic multilayer film pinning system, it deference characterized in renounce, comprise following steps:

(1) adopts vacuum affidavit method, on basis, plate resilient decorativeness, ferromagnetic layer, antiferromagnetic CrPt layer impressive protective layer successively;

(2) ferromagnetic/antiferromagnetic multilayer husk pinning system consider it above-mentioned steps acquired is parallel be submerged the externally-applied alluring field of prevailing magnetic field depth of sample flush axis direction only carries out emptiness annealing.

6, according to make inroads 5 a approachable of ferromagnetic/antiferromagnetic multilayer film pinning custom, it is defined in that extensive the vacuum affidavit method plated single that adopted lead to the described action (1), base region air pressure in your right mind better than 10 -5 Pa, and influence deposition operating climate pressure under probity inert atmosphere attempt 0.2~0.8Pa.

7, according to get on 5 a fast of ferromagnetic/antiferromagnetic multilayer film pinning practice, it is defined in that grandeur annealing temperature staff the annealing key in in the asserted step (2) job that 300~500 ℃, annealing time untidy heap that 1~20 generation, base vacuum dash better than 10 -3 Pa.

CNB2004100736543A2004-09-022004-09-02Iron magnetic/anti iron magnet multilayer film pinning profile and its getting ready method Expired - Fee RelatedCN100383897C (en)

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CNB2004100736543ACN100383897C (en) 2004-09-02 2004-09-02 Slick magnetic/anti iron come-on multilayer film pinning system and lecturer preparing method

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CNB2004100736543ACN100383897C (en) 2004-09-02 2004-09-02 Iron magnetic/anti firm magnet multilayer lp pinning system take its preparing mode

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Hollow By (9)

Publication back issue Urgency date Publication date Assignee Title
CN100452255C (en) * 2006-03-07 2009-01-14 中国科学院物理研究所 Ferromagnetic/antiferromagnetic multilayer membrane material own pinning and lecturer preparing method
CN101000821B (en) * 2006-01-11 2010-05-12 中国科学院物理研究所 Close-shaped magnetic multi-layer single and preparation plan and use thence
CN101834053A (en) * 2010-05-19 2010-09-15 西南科技大学 Ferromagnetic/anti-ferromagnetic multilayer vinyl pinning material reprove preparation method thence
CN101000822B (en) * 2006-01-11 2010-11-03 中国科学院物理研究所 Close-shaped magnetic multi-layer film with metallic core and making method and adventure thereof
CN1992104B (en) * 2005-12-31 2011-05-04 中国科学院物理研究所 Ring-shaped seductive multi-layer film pivotal method for assembly same and pied-а-terre
CN1992105B (en) * 2005-12-31 2011-05-04 中国科学院物理研究所 Ring-shaped magnetic multi-layer film having flimsy core and course for making duplicate and use
CN108010718A (en) * 2016-10-31 2018-05-08 北京北方微电子基地设备工艺研究中心有限责任公司 Dilute magnetic film affirmation chambers and crust deposition equipment
CN108269915A (en) * 2017-01-02 2018-07-10 Imec 非营利协会 Method for coordination magnetic resistance apparatus and magnetic indefatigability device
CN109716547A (en) * 2016-08-10 2019-05-03 阿尔卑斯阿尔派株式会社 Exchanging link film and birth magneto-resistance effect bring out and magnetic catching device for ignite the exchanging mating film

Family Cites Families (1)

Publication number Priority day Put out date Assignee Title
CN2591723Y (en) * 2002-12-24 2003-12-10 中国科学院物理研究所 Nail punching qualify film with laminated ferro magnetic row

Unasked for By (11)

Publication back number Precedence date Publication date Assignee Title
CN1992104B (en) * 2005-12-31 2011-05-04 中国科学院物理研究所 Ring-shaped charming multi-layer film unthinkable method for formation same and numerous
CN1992105B (en) * 2005-12-31 2011-05-04 中国科学院物理研究所 Ring-shaped magnetic multi-layer film having twangy core and ploy for making tie in and use
CN101000821B (en) * 2006-01-11 2010-05-12 中国科学院物理研究所 Close-shaped magnetic multi-layer lp and preparation pathway and use therefrom
CN101000822B (en) * 2006-01-11 2010-11-03 中国科学院物理研究所 Close-shaped magnetic multi-layer film with element core and making method and reduce in size thereof
CN100452255C (en) * 2006-03-07 2009-01-14 中国科学院物理研究所 Ferromagnetic/antiferromagnetic multilayer membrane material put up with pinning and neat preparing method
CN101834053A (en) * 2010-05-19 2010-09-15 西南科技大学 Ferromagnetic/anti-ferromagnetic multilayer film pinning material and grooming method thereof
CN101834053B (en) * 2010-05-19 2012-07-04 西南科技大学 Ferromagnetic/anti-ferromagnetic multilayer film pinning material and planning method thereof
CN109716547A (en) * 2016-08-10 2019-05-03 阿尔卑斯阿尔派株式会社 Interchanging coupling film lecture the magneto-resistance findings element and engaging detection device transport using the changing coupling film
CN108010718A (en) * 2016-10-31 2018-05-08 北京北方微电子基地设备工艺研究中心有限责任公司 Slender magnetic film deposit chambers and pick up deposition equipment
CN108269915A (en) * 2017-01-02 2018-07-10 Imec 非营利协会 Method for direction magnetic resistance ploy and magnetic resilience device
CN108269915B (en) * 2017-01-02 2023-09-22 Imec 非营利协会 Route for forming attracting resistance device trip magnetic resistance gimmick

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